Abstract
ABSTRACTDefects in the surface conductive layer of CVD-diamond films have been investigated by ESR method. ESR analysis revealed that defect center ( Pac-center: g=2.003, ΔΔ Hpp=8 Oe ) in the non-diamond phase carbon region exists in the surface conductive layer. The Pac-center with a spin density of the order of 1020spins/cm3 or above was formed in the surface layer by hydrogen radical irradiation during the diamond deposition. Formation of the Pac-center causes the resistivity of CVD-diamond to decrease ( from 9 × 108 Ω to 1.8 × 106 Ω )
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