Error correction based on micro-scanning preprocessing for an optical micro-scanning thermal microscope imaging system

Abstract

In recent years, various thermal microscope imaging systems have been developed to meet the demands of micro-thermal analysis for large-scale integrated circuits, biomedical, science, and research fields. However, conventional thermal microscope imaging systems, which use cooled infrared detectors are heavy and expensive. In order to solve this problem, we developed a thermal microscope imaging system based on an uncooled infrared detector. However, the spatial resolution of the thermal microscope imaging system based on an uncooled infrared detector is low. With optical micro-scanning technology, the spatial resolution of the thermal microscope imaging system can be increased without increasing the detector dimension or reducing the detector unit size. In order to improve its spatial resolution, a micro-scanning system based on optical plate rotation was developed, and an optical microscanning thermal microscope imaging system was obtained after the integrated design. Due to environmental factors, mechanical vibration, alignment error and other factors, there is micro-scanning error in the designed micro-scanning thermal microscope imaging system. The four low-resolution images collected by micro-scanning thermal microscope imaging system are not standard down-sampled images. The quality of the image interpolated directly by four collected images is reduced and the performance of the micro-scanning system isn’t fully exploited. Therefore, based on the proposed second-order oversampling reconstruction micro-scanning error correction algorithm and the new edge directed interpolation algorithm, a new micro-scanning error correction technique is proposed. Simulations and experiments show that the proposed technique can effectively reduce optical micro-scanning error, improve the systems spatial resolution and optimize the effect of the imaging system. It can be applied to other electro-optical imaging systems to improve their spatial resolution.