Abstract
Ion beam assisted deposition (IBAD) is a powerful new technique for producing adherent surface coatings with special properties. A facility for this technique is described. It consists of a cylindrical vacuum chamber, a rotating cooled target holder, an electron gun with evaporation source, a duoplasmatron ion source for gaseous ions, and the necessary power supplies and controls. Evaporation and bombardment are possible in sequence or simultaneously. The ion source delivers ions up to 30 keV energy. The maximum beam current is ∼ 7 mA for argon. The results of recent preliminary experiments to produce aluminum coatings on steel are reported and discussed.
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