Abstract
We have succeeded in developing a technology for the treatment of TiN and TiCN thin films by reactive ion beam assisted deposition (IBAD). This technology was developed mainly to improve the corrosion resistance of the cutting blade of our “wet and dry” shaver. Significant improvement in the corrosion resistance was found using the potentiostatic method and endurance testing in a corrosive environment. The treatment cost, which has been considered a major obstacle to industrial application of IBAD, was the same as for ion plating, using 24 h continuous operation achieved by adding our own knowledge to design of the equipment and the ion source and vapor source.
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