Abstract
Summary form only given. The neon soft X-ray (SXR) emission characteristics of a Fast Miniature Plasma Focus (FMPF-3) device have been investigated. The FMPF-3 device used for our experiment is of sub-kilojoule (100-240 J) energy capacity, which is an order of magnitude lesser than the other well established plasma focus devices on which most of the neon x-ray emission studies have been performed. A detailed investigation on the influence of different geometrical parameters of the anode, the pressure of the filling gas and high-Z gas admixture on the SXR emission was done to optimize the neon SXR yield from FMPF-3 and there-by make it a potential source for soft X-ray lithography. The highest SXR yield of 1.2 J/shot, corresponding to a wall plug efficiency of 0.6 %, was obtained for 20 mm long tapered stainless steel anode.
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