Abstract
Measurements of the energy distribution of Ga liquid metal ion sources (LMIS) have been carried out using different emitters and tip currents between 0.5 and 3 μA. For LMIS operating at low emission voltages and with low tip currents, distributions as narrow as 2.3 eV full width at half-maximum have been observed. These narrow distributions can only be observed if the emitter tip is placed very close (0.5 mm) to the extraction electrode.
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