Energy Filtered Electron Backscattering Images of 10-nm NbC and AIN Precipitates in Steels Computed by Monte Carlo Simulations

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In modern materials science, it is important to improve the resolution of the Scanning Electron Microscope (SEM) because small phases play a crutial role in the properties of materials. The Transmission Electron Microscope (TEM) is the tool of choice for imaging small phases embedded in a given matrix. However, this technique is expensive and also is slow owing to specimen preparation. In this context, it is important to improve spatial resolution of the SEM.In electron backscattering images, it is well know that the backscattered electrons have an energetic distribution when they escape the specimen.The electrons having loss less energy are those which have travelled less in the specimen and thus escape closer to the electron beam. So, in filtering the energy of the backscattering electron and keeping those which have loss only a small amount of energy to create the image, a significant improvement of the resolution of such images is expected. New detectors are now under development to take advantage of this technique of imaging.