Abstract
We recently developed a backside-illuminated CMOS image sensor for soft X-ray detection based on a commercial CMOS sensor. This sensor demonstrated a high quantum efficiency, low readout noise of 2.6 e− rms, and high frame rate of 48 fps. This sensor also showed an energy resolution of 80 eV to 1,000 eV photon. We demonstrated fluorescence detection from highly-oriented graphite and a polymethyl methacrylate film using a simple setup, where the samples faced a CMOS sensor without a monochromator. This energy-resolving performance and high frame rate will facilitate new applications for soft X-ray and EUV experiments.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
