Abstract
The generation of intense flux of energetic oxygen ions in the sputtering of Zr target in Ar+O 2 atmosphere is investigated. The energetic negative oxygen ions were detected using a constructed probe. The photoemission intensity of sputtered Zr atoms was observed in order to monitor the surface oxidization of the Zr target. The results indicate that the surface of the Zr target undergoes rapid oxidization during sputtering. The generation of the intense flux of energetic negative oxygen ions is considered to occur as a result of sputtering the heavily oxidized Zr target.
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