Employment of DC Sputtering for Synthesizing Nano Cadmium Oxide for Sevoflurane Anesthetic Gas Sensor

Abstract

Thin films of CdO doped with AgNPs were deposited on ITO quartz substrates using DC sputtering protocol. The films were characterized using different techniques like XRD pattern for both undoped and doped one CdO NPs with silver nanoparticles, with various doping concentrations (0.4, 1.04, and 1.20) at%. It has been noticed from X-ray pattern that the nanostructured films possessed polycrystalline reflection patterns and the Prevailing orientation plane (111) on 2θ=33.35o in addition the reflection intensity increases with increasing of the doping concentration (1chip, 2chips and 3 chips) of Silver nanoparticles that chipped to the surface cadmium plate. Microstructures characterization of synthesized samples was studied using SEM. Images of SEM demonstrated that the particle size increases directly along with the number of implanting Silver NPs with three chips (1, 2 and 3) to the essential plate of Cd metal. EDXS spectroscopy counting the elemental composition using the atomic percentage, it has been demonstrated existence of silver in doped once. More, the percentage of silver content increase with increasing the number of Ag chips increases as follows The Ag content in the doped films of the cadmium metal plate with 1 attached is (1.39 wt. % for one Ag chip, 2.02 wt. % for two Ag chips while, the concentration has been increased further for three Ag chips to 3.24 at. %. Sensitivity of the manufactured device to Sevoflurane Anesthetic Gas Sensor indicates that the resistance decreases with the increase in the number of silver chips, and this is due to an increase of the pure charge carriers of the current. Keywords: Cadmium Oxide, Sliver, Structural Properties, DC reactive magnetron sputtering method, Sevoflurane Anesthetic Gas.