Abstract

Electrospray is a simple and cost-effective method to fabricate micro-structured thin films. This work investigates the electrospray process of ZnO patterns. The effects of experimental parameters on jet characteristics and electrosprayed patterns are studied. The length of stable jets increases with increasing applied voltage and flow rate, and decreases with increasing nozzle-to-substrate distance, while electrospray angles exhibit an opposite trend with respect to the stable jet lengths. The diameter of electrosprayed particles decreases with increasing applied voltage, and increases with flow rate. Furthermore, an alcohol gas sensor is presented. The ZnAc is calcined into ZnO, which reveals good repeatability and stability of response in target gas. The sensing response, defined as the resistance ratio of R0/Rg, where R0 and Rg are resistance of ZnO in air and alcohol gas, increases with the concentration of alcohol vapors and electrospray deposition time.

Highlights

  • Inkjet printing [1] has attracted attention for the fabrication of micro/nano-functional structures as it is a non-contact technology that does not require etching and exposure processing

  • 20 mm applied voltage of canelectrospray be seen that the 3 shows the effectdistance of flowofrate on and the an stable jet lengths and onItthe angles stable jet lengths increase with rate, while the electrospray angles decrease with the 3 shows the effect ofincreasing flow of rate on the stable lengths and on the at that at a fixed nozzle-to-substrate distance

  • This study investigates the effect of experimental parameters on the electrospray process of

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Summary

Introduction

Inkjet printing [1] has attracted attention for the fabrication of micro/nano-functional structures as it is a non-contact technology that does not require etching and exposure processing. Electrospray is an emerging technology that utilizes electric fields to realize liquid jet ejection to fabricate micro-/nano-scale droplets, particles, and thin films [3]. There are a number of different methods used to fabricate ZnO films [13,14], including ultrasonic spraying, thermal evaporation, and chemical vapor deposition, etc. Among these methods, electrospray is a Micromachines 2018, 9, 66; doi:10.3390/mi9020066 www.mdpi.com/journal/micromachines. 7 use of electrospray to deposit ZnO patterns. The effects of experimental parameters on electrospray jet evaporation, and chemical vaporpatterns deposition, Among these methods, electrospray a simple and characteristics and electrosprayed are etc.

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