Abstract
We have performed elastic recoil detection analysis with time-of-flight detection (TOF-ERDA) to investigate the hydrogen desorption cross-section of electron-stimulated desorption (ESD). We confirmed that the TOF-ERDA measurement was valid for quantitative analysis of surface hydrogen in spite of the use of a low-energy ion beam. The desorption cross-section for the H/Si(001)-1×1 surface was determined for incident electron energy range of 25–200 eV. It was found that threshold electron energy of ESD was about 23 eV. The detailed feature of the electron energy dependence of the ESD cross section provided the information on the mechanism of ESD, which was related to the core band excitation.
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