Abstract
We have performed time of flight elastic recoil detection analysis (TOF-ERDA) measurements to investigate the hydrogen desorption cross section of electron stimulated desorption (ESD) from a hydrogen-terminated Ge/Si(001) surface. These results showed that TOF-ERDA measurement was valid for quantitative analysis of surface hydrogen. The desorption cross sections were determined for incident electron energy ranges of 35–200 eV. It was found that the threshold electron energy of ESD was about 30 eV. The desorption cross sections indicated the dependence of irradiated electron energy. This meant that the ESD mechanism was related to the core band excitation.
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