TPD and ESD of hydrogen from disilane covered Si(100)

Abstract

Disilane covered Si(100) was investigated using temperature programmed desorption (TPD) and electron stimulated desorption (ESD) for various disilane exposures. At low coverages, only monohydride species are observed on the surface as seen by TPD. At high coverages, dihydride species appear. Kinetic energy distributions (KEDs) for H + and H − were also obtained from Si(100) covered with varying amounts of disilane. Both H + and H − KEDs exhibited two peaks each, suggesting that there are at least two types of hydrogen bound states on the surface. ESD decay curves were also obtained and exhibited double exponential decay behavior. ESD total cross sections were calculated using H + and H − signal decays and compared with related data from the literature.