Abstract
The electron field emission property of nanostructure wrinkle created by silver doped amorphous diamond like carbon (a-Ag:DLC) thin film have been reported. The amorphous Ag:DLC thin film have been deposited on elastomeric polymer of poly-dimenthylsiloxane (PDMS) and silicon substrate by direct current plasma enhanced chemical vapor deposition (DC-PECVD) process. Due to difference in elastic moduli of PDMS substrate and a-Ag:DLC thin films, a well-defined nanostructure wrinkle pattern have formed on PDMS surface. Is has been observed that the wavelength of the created wrinkle decreased as increased the Ag content in the DLC film. Due to the surface nanostructure as well as change in electronic structure by Ag doping, the a-Ag:DLC wrinkled film showed good electron field emission properties with a low threshold field.
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