Abstract
This paper reports on the enhancements introduced into the ITC-irst RF MEMS multi-user fabrication process, which have been assessed by means of the electromechanical characterization of a set of test structures consisting of low actuation voltage capacitive switches. A simple quasistatic CV measurement has been used to extract the switch capacitance in both the on and off states ( C on and C off) and the voltage needed for the actuation of the different designs. The devices under test use folded serpentine springs and large area actuation electrodes to decrease the pull-in voltage. The spring constant of the suspensions is used to control the actuation voltage of the different designs with a slight increase of the overall size and without affecting the switching performance at higher frequencies. The introduction of a floating metal layer into the flow of the fabrication process has allowed a great increase in the off state capacitances, getting C off/ C on ratios up to 10 times greater than the ones obtained for the same structures without this feature.
Published Version
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