Electromagnetic Metrology for Nano- Electromechanical Systems

Abstract

This paper outlines how demands on electromagnetic metrology have developed over recent years with the continuing reduction in the typical length scale of electronic components and circuits. In addition, novel materials, especially 2-D self-supporting structures such as graphene, have properties quite unlike the conventional systems. At the nanoscale radical changes occur in techniques required and even in the physical quantities measured. This paper focusses on the example of a near-field scanning microwave microscope and its application to nano-electromechanical system resonators to illustrate these changes and challenge.