Abstract
Near-field scanning microwave microscopy has demonstrated unique capability of characterization of materials’ physical–chemical properties at high frequencies with nanometer spatial resolution. In this chapter, we review the technical advances of scanning microwave microscopy in comparing to other scanning probe microscopes regarding spatial resolution well beyond the Abbe diffraction limit at radio frequency and microwave, under surface detection, and flexibility in versatile environments. Modeling of the near-field scanning microwave microscopy will then be discussed including the surrounding circuits and electrodynamic modeling of tip-sample interactions. This provides a comprehensive understanding of the frequency-dependent imaging contrast at high frequencies. Later, a few examples of using the near-field scanning microwave microscopy have been given in investigations of nanostructured ferrites and two-dimensional graphene sheets. This non-invasive and non-destructive technology can find immediate applications in high-speed electronics, life science, and trusted electronics.
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