Electromagnetic Metrology for NEMS

Abstract

This paper outlines how demands on electromagnetic metrology have developed over recent years with the continuing reduction in the typical length scale of electronic components and circuits. In addition novel materials, especially 2D self-supporting structures such as graphene, have properties quite unlike conventional systems. At the nanoscale radical changes occur in techniques required and even in the physical quantities measured. This paper focusses on the example of a nearfield scanning microwave microscope and its application to nanoelectromechanical system resonators to illustrate these changes and challenges.