Electrochemical Weakening Material Strength for Accelerated Thinning of Silicon Carbide Substrates

Abstract

This paper presents a novel approach to expedite the thinning of silicon carbide (SiC) substrates, a crucial step in enhancing material performance and extending chip longevity by reducing volume resistivity. The traditional methods of SiC substrate thinning, such as diamond wheel grinding and plasma etching, have inherent limitations, including the risk of wafer breakage and high processing costs. In response to these challenges, we propose an innovative technique involving the electrochemical etching attenuation of SiC strength, offering a cost-effective and efficient solution.In this study, we employed an electrochemical method to initially weaken the SiC substrate from the surface to a defined depth, followed by fine-tuning its thickness using a conventional diamond grinding wheel. Remarkably, our results demonstrate that SiC substrates subjected to electrochemical treatment exhibit well-structured lattices free from residual stresses. This novel approach not only reduces the risk of wafer breakage but also enhances the material's integrity (Figure 1).To gain deeper insights into the effects of electrochemistry on SiC material strength, advanced characterization techniques, including scanning electron microscopy, were employed. Our findings reveal that the electrochemically treated SiC surface exhibits a sponge-like morphology, with a cross-sectional profile showcasing prominent columnar structures (Figure 2). This sponge-like structure is attributed to the removal of silicon atoms during anodization, affirming the effectiveness of electrochemical methods in rapidly attenuating the material strength of SiC substrates, thereby facilitating their efficient thinning through grinding without compromising substrate integrity.In summary, this research highlights the potential of electrochemical methodologies for the initial weakening of SiC substrates, leading to accelerated and cost-effective thinning processes. This breakthrough not only expedites SiC substrate thinning but also contributes significantly to the advancement of SiC substrate thinning and grinding techniques, promising substantial benefits for future semiconductor device fabrication. Figure 1