Theoretical investigation of conductivity sensitivities of SiC-based bio-chemical acoustic wave sensors

Abstract

The phase velocities, electromechanical coupling coefficients, conductivity sensitivities, insert losses, and minimum detectable masses of Rayleigh and Lamb waves sensors based on silicon carbide (SiC) substrates are theoretically studied. The results are compared with the performances of the sensors based on conventional silicon substrates. It is found that the sensors using SiC substrates have higher electromechanical coupling coefficients and conductivity sensitivities than the conventional silicon-based sensors in virtue of piezoelectricity of the SiC. Moreover, higher phase velocities in SiC substrates can reduce the insert losses and minimum detectable masses of the sensors. In this case, in the detection of the gas with the tiny mass as the hydrogen, in which the conductivity sensitivity is more important than the mass sensitivity, the sensor based on the SiC substrate has a higher sensitivity and exhibits the potential to detect the gas with the concentration below the ppm level. According to the results, the performances of the sensors based on the Rayleigh and Lamb waves using the SiC substrates can be optimized by properly selecting piezoelectric films, structural parameters, and operating wavelengths.