Electrical Properties of Cr Doped Pb0.5Sr0.5TiO3 Thin Films Prepared by Chemical Solution Deposition Method

Abstract

Pb0.5Sr0.5TiO3 (PST50) thin films with different Cr doping amounts were prepared on LaNiO3 coated silicon substrates by a chemical solution deposition method. Their dielectric and ferroelectric properties were studied at room temperature. The dielectric constant decreased from 417 to 207 (at 1 kHz), as the Cr content increased from 0 to 8%. When the content of Cr was 3%, the tunability and the figure of merit factor reached maximal values of 61.3% and 21.4, respectively. The remnant polarization of the Cr-doped PST thin films decreased from 7.4 μC/cm2 to 2.0 μC/cm2, as the Cr content increased from 0 to 5%.