Abstract
The effect of treatment temperature on structural, morphological, and electrical properties of Nb2O5 thin films using the precipitation method is presented in this work. Clear enhancements, such as decreased stress and dislocation density values, are recognized in structural properties after heat treatment. AFM result shows increased average grain size and RMS of the prepared thin film with treatment temperature from 87.87 °C to 110.97 °C and rising temperature from 25 °C to 600 °C. Conductivity type conversion from n- to p-type is observed when the heat treatment is increased from 600 °C to 700 °C based on Hall effect measurement results.
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