Electric current controlled liquid phase epitaxy of GaAs on N+ and semi-insulating substrates

Abstract

Electric current controlled liquid phase epitaxy (LPE) of GaAs has been performed on both n+ and semi-insulating substrates. Growth is induced by current flow across the substrate-melt interface. The furnace temperature is held constant during growth so that direct electrical control of the growth process is achieved. The dependence of the growth rate on both the electric current density across the substrate-melt interface and the ambient furnace temperature was determined. Current densities from 5 to 20 A/cm2 were employed and furnace temperatures ranging from 680 to 800°C were used. Sustained steady state growth rates as small as 0.022μm/min and as large as 1.4μm/min were obtained. For a given furnace temperature and current density, the measured growth rates on semi-insulating substrates range from 48% to 77% of the rates obtained on n+ n substrates. The surface morphology of the epitaxial layers is observed to depend on the electric current density employed during growth. Electric current controlled doping modulation was studied in epitaxial layers grown from unintentionally doped melts. The degree of doping modulation achieved is approximately proportional to the change in applied current density. Approximately a 40% increase in the net electron concentration is obtained by changing the current density from 10 to 30 A/cm2 during growth. Preliminary experiments with tin doped epitaxial layers indicate that similar changes in the amount of tin incorporation can be achieved.