Abstract
A three-layer mechanical model, which consists of a quartz layer, a solid film layer and a fluid-phase film layer, is presented and a formula is deduced for calculating the relationship between the surface state and frequency shift of a quartz-crystal resonator. The theory has been used to analyse the characteristic of a resonant humidity sensor using a coated quartz-crystal resonator. Experiments prove that the new deduced formula gives better agreement with experimental results than Sauerbrey's formula. Furthermore, the three-layer theory can be widely used in developing sensors constructed with quartz-crystal resonators.
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