Abstract
In this work, surface modification of 6FDA-BisAAF fluorine-contained polyimide by or plasma was carried out and material characteristics of the surfaces after plasma treatment were investigated. X-ray photoelectron spectroscopy analysis reveals that plasma will react with carbon atoms in the polyimide structure to form C–O bonding on the surface and destroy the polymer structure. Reactions between nitrogen and fluorine are thermodynamically favorable during the plasma treatment and result in a significant defluorination on the surface and an increase of water absorption. The polyimides, with or without plasma treatment, were made into a metal-insulator-silicon structure to investigate its current leakage characteristics. From the current-voltage (I-V) measurement, the plasma treated sample reveals a greater leakage current than that of the untreated and plasma treated sample. The unstable bonds created by the plasma treatment may absorbed more molecules and degraded electrical characteristics. Details are discussed in the paper.
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