Abstract

Mg-doped CuAlO 2 thin films are prepared by the chemical solution method. The XRD results show that the solid solubility of Mg species on Al sites in CuAlO 2 lattice is lower than 2 at.%. When less than 2 at.% of Mg is added to the CuAlO 2 film, the surface roughness of the films was reduced with Mg substitution. Moreover, the c-axis orientation of the films improves because the in-plane fusion between CuAlO 2 crystallites is hindered. Optical and electrical measurements show that substituting Al 3+ in the films with Mg 2+ increases both their transmittance in the visible region and their optical band gaps. As well, their electrical conductivity is enhanced. At 300 K, the conductivity of the 1 at.% Mg-doped sample is up to 5.2 × 10 −3 S/cm. Thus, Mg-doped CuAlO 2 films may have potential applications as transparent conductive oxides.

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