Abstract
Lanthanum doped lead titanate (PLT) thin films consisting of different La concentrations were fabricated on Pt/Ti/SiO2/Si using sol-gel method. The films were dried at 440°C for 5 min and fired at 600°C using rapid thermal annealing (RTA) for 1min. The preferred orientation (texturing) and the morphology of the PLT film were changed with La concentration and a possible cause of the texturing has been discussed. The effects of La doping to the Lead titanate films on the dielectric constants, P-E hysteresis loop and pyroelectric coefficient were measured and discussed.
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