Abstract
The ID18F microprobe end-station of the European Synchrotron Radiation Facility (ESRF) is dedicated to precise and reproducible quantitative X-ray fluorescence analysis in the ppm level with ⩽5% accuracy for elements of Z⩾19 and micron-size spatial resolution. In order to fulfill this requirement the precise monitoring and normalization of the intensity variation of the focused micro-beam is necessary. The various effects influencing the intensity variation, hence the stability of the μ-beam, were investigated by placing different detectors (miniature ionization chamber, photodiodes) into the monochromatic beam. The theoretical statistical error of the measured signal in each detector was estimated on the basis of the absorption and e −–ion-pair production processes and was compared with the measured statistical errors.
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