Quantitative X-ray fluorescence analysis at the ESRF ID18F microprobe

Abstract

The new ID18F end-station at the European synchrotron radiation facility (ESRF) in Grenoble (France) is dedicated to sensitive and accurate quantitative micro-X-ray fluorescence (XRF) analysis at the ppm level with accuracy better than 10% for elements with atomic numbers above 18. For accurate quantitative analysis, given a high level of instrumental stability, major steps are the extraction and conversion of experimental X-ray line intensities into elemental concentrations. For this purpose a two-step quantification approach was adopted. In the first step, the collected XRF spectra are deconvoluted on the basis of a non-linear least-squares fitting algorithm (AXIL). The extracted characteristic line intensities are then used as input for a detailed Monte Carlo (MC) simulation code dedicated to XRF spectroscopy taking into account specific experimental conditions (excitation/detection) as well as sample characteristics (absorption and enhancement effects, sample topology, heterogeneity etc.). The iterative use of the MC code gives a ‘no-compromise’ solution for the quantification problem.