Effects of an ultrathin silicon oxynitride buffer layer on electrical properties of ferroelectric Bi4Ti3O12 thin films on p-Si(100) surfaces

Abstract

Electrical properties of ferroelectric Bi4Ti3O12 (BiT) films on Si(100) using a 1 nm thick silicon oxynitride (SiON) buffer were investigated. The capacitance–voltage (C–V) characteristics of Au/BiT/SiON/Si(100) exhibited hysteresis loops with a memory window of 2 V due to the ferroelectricity, and did not show large carrier injections. The effects of the SiON buffer were demonstrated in current–voltage characteristics. In the reverse bias region, a leakage current density of the specimen without the SiON buffer was much larger than that of the specimen with the buffer. Apart from these electrical measurements, anomalous features appeared in C–V characteristics of the illuminated specimen, which were likely to be due to the ac response of the optically generated electrons in some trap states at the interface.