Abstract
Abstract This work examines the morphological, structural, optical, and gas-sensing characteristics of ZnO thin films doped with Al that were created by the sol-gel spin coating technique. The thin films, doped with varying aluminum concentrations (0%, 2%, and 5%), were characterized using XRD, UV-visible spectroscopy, and FE-SEM to assess their crystallinity, band gap, and surface morphology. XRD analysis confirmed the incorporation of Al into the ZnO lattice without forming secondary phases, while UV-visible spectroscopy revealed an increase in transmittance and band gap with higher Al doping. FE-SEM images showed a transition from agglomerated grains to smoother surfaces with increased Al content. Gas sensing performance was evaluated using low-concentration CO2 as the target gas. The results demonstrated that Al doping significantly enhances the CO2 sensing response, with the 5% Al-doped ZnO exhibiting the optimal sensitivity due to increased carrier concentration and improved surface interaction. These findings suggest that Al-doped ZnO thin films are promising candidates for efficient CO2 gas sensors, combining enhanced structural and optical properties with superior gas sensing capabilities.
Published Version
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