Effect of the Temperature on Diamond-Like Carbon (DLC) Thin Film Based on LIS

Abstract

Diamond-like carbon (DLC) thin films were deposited on YG6 cemented carbide by an anode-layer linear ion source (LIS). The effect of different temperatures (20°C, 80°C, 115°C and 150°C) on DLC thin films was investigatedby using atomic force microscope (AFM), scanning electron microscope (SEM) and Raman spectroscopy. It was found thatthe surface roughness of the film decreased at first and then increased with the increase of the temperature, and reached the trough at 80°C. The intensity ratio (ID/IG) and the adhesion of the film increased at first and then decreased, and both of them reached the peak at 80°C. When the temperature was 80°C, the surface roughness was 6.9nm, the intensity ratio (ID/IG) was1.91 and the critical failure load was 107.23N. The results show that the temperatures have a great effect on the surface morphology and mechanism properties of DLC thin films. Consequently, this paperfurther studied the effect mechanism of different temperatures on DLC thin films based on the experiment.