Abstract
In this study, three kinds of atomic disordered Cu50Zr50 metallic glass thin films (MGTFs) with different structural heterogeneities are prepared by controlling the substrate temperature in magnetron sputtering, i.e., controlling the thermal history. A work-hardening behavior is observed in the MGTFs by cyclic nanoindentation. The spatial distribution of structural heterogeneities, and the correlation length of the viscoelasticity of heterogeneity in three MGTFs with different thermal histories demonstrate the effect of thermal history on the viscoelasticity of three MGTFs. The activation volume of heterogeneity controlling the initiation of shear band during local deformation correlates the correlation length of viscoelastic heterogeneity, which is used to elucidate the relationship between the structural heterogeneity and the work-hardening behavior. The results show that the increase of the substrate temperature causes the viscosity of structural heterogeneity to be increased, which means the reduction of viscoelastic heterogeneity correlation length. In this case, the activation volume of heterogeneity in the MGTF is decreased, which leads the formation of shear band to be difficult.
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