Abstract
We investigate the laser damage behaviour of anelectron-beam-deposited TiO2 monolayer at different processparameters. The optical properties, chemical composition, surfacedefects, absorption and laser-induced damage threshold (LIDT) of filmsare measured. It is found that TiO2 films with the minimumabsorption and the highest LIDT can be fabricated using a TiO2starting material after annealing. LIDT is mainly related to absorptionand is influenced by the non-stoichiometric defects for TiO2films. Surface defects show no evident effects on LIDT in thisexperiment.
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