Abstract
Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order model based on an energy approach is formulated. It has been shown that nonlinear dynamics of an electrically actuated micro-plate, in the presence of differential pressure, significantly differs from those under purely electrostatic loads. The micro-plate may lose stability upon either saddle-node or period-doubling bifurcations. It has also been found that in the presence of a differential pressure, increasing the DC or AC voltages may surprisingly help to stabilize the motion of the micro-plate.
Highlights
Actuated micro-electro-mechanical systems (i.e., MEMS) are increasingly being used in diverse engineering applications, such as sensors and actuators [1,2]
When an electric potential is applied to the capacitor, an attractive electrostatic load is induced between the two electrodes, leading to the deformation of the flexible one
The nonlinear dynamics and stability of an electrically actuated micro-plate subjected to a differential pressure has been addressed
Summary
Actuated micro-electro-mechanical systems (i.e., MEMS) are increasingly being used in diverse engineering applications, such as sensors and actuators [1,2]. Actuated micro-devices typically employ a parallel-plate capacitor, in which at least one electrode is flexible. When an electric potential is applied to the capacitor, an attractive electrostatic load is induced between the two electrodes, leading to the deformation of the flexible one. When the potential fluctuates with time, a forced dynamic motion is induced in the system, which can be detected by capacitive changes of the system [5,6]
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