Effect of Molecular Oxygen on YBCO Thin Films with (110)-Orientation

Tetsuji Uchiyama,Fusao Ichikawa,Takeshi Fukami,Zhen Wang,Yoshitomo Goto,Takafumi Aomine

doi:10.1007/978-4-431-66874-9_239

Effect of Molecular Oxygen on YBCO Thin Films with (110)-Orientation

Tetsuji Uchiyama, Fusao Ichikawa + Show 4 more

https://doi.org/10.1007/978-4-431-66874-9_239

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Publication Date: Jan 1, 1999

Affiliation: Kyushu University, Kobe Material Testing Laboratory (Japan)

#YBa2Cu3O7-x Thin Films #YBa2Cu3O7-x + Show 8 more

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Abstract

We have investigated the preparation of c-axis in-plane (110)-oriented YBa2Cu3O7-x (YBCO) thin films with both high crystallinity and high superconductivity, which means a narrow temperature width of the transition (ΔT c ). YBCO thin films with c-axis orientation, a-axis orientation and (110)-orientation have been prepared by depositing on SrTiO3 substrates using an inverted cylindrical DC magnetron sputtering system. On the preparation without an annealing in molecular oxygen, ΔT c becomes narrow with decreasing the deposition rate. We conclude that molecular oxygen is taken into the films effectively during the sputtering.

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