Abstract
We have systematically investigated the in-situ growth of YBa2Cu3O7-x (YBCO) thin films on SrTiO3 (100) substrate as a function of deposition rates in the range of 0.1–12.2 nm/s using different repetition rates of pulsed laser. As the deposition rates increases, YBCO thin film with cubic crystalline structure was observed at a substrate temperature of 650 °C and cation disordering in YBCO thin film was observed at a substrate temperature of 800 °C. The cubic YBCO thin film growth and the cation disordering in YBCO thin film at high deposition rates were explained by the cation kinetics model.
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