Abstract
BaTi5O11 films were prepared on Pt/Ti/SiO2/Si substrates by a laser chemical vapor deposition method. The effect of laser power (P L) on the electrical conductivity of the BaTi5O11 films was investigated. The electrical resistivity of the grains was much higher than that of the grain boundaries, which indicated that the electrical conductivity along the grain boundary was dominant. For the BaTi5O11 films, the conduction was mainly attributed to oxygen vacancies, and the electrical conductivity was strongly affected by their microstructures and the concentration of the charge carriers. With increasing the P L, the grain size increased and the grain-boundary density decreased, which resulted in the decrease of the electrical conductivity. At the same time, the increase of T dep led to higher concentration of charge carriers, which resulted in the increase of electrical conductivity.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Materials Science: Materials in Electronics
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
