Effect of indium on the conductivity of poly‐crystalline GaN grown on high purity fused silica

Abstract

AbstractA significant resistivity reduction was observed for GaN:Si films grown on high purity fused silica by metal organic vapour deposition when an InGaN:Si sacrificial layer was inserted beneath or within the GaN:Si layers. Thereby at least part of the GaN:Si layer on top of the sacrificial layer was grown at high temperature. Using this technique, a film resistance of 0.8 Ω cm was obtained, compared to a resistance of 60 Ω cm measured for the same layer stack without InGaN sacrificial layer.