Effect of fabrication errors on axial super-resolution property of a three-zone pupil filter

Abstract

Two models have been established using the basic definitions of super-resolution characteristic parameters for normalized spot size G A and Strehl ratio S A, of a three-zone axial super-resolution pupil filter with fabrication errors, to quantitatively analyze the effect of these fabrication errors on the axial super-resolution property. These new models established to describe the analytic relationship of G Ae and S Ae of a pupil filter with its fabrication errors and its transmission function A( ρ), phase function φ( ρ) and structural parameters, directly relate the super-resolution parameters of a three-zone axial super-resolution pupil filter to its fabrication errors to make the quantitative analyses of the effect of fabrication errors easier, thereby providing a theoretical basis for the analysis, design and fabrication of a three-zone axial super-resolution pupil filter. The models established for G Ae and S Ae have been used to analyze the effect of the fabrication errors of a pupil filter on its super-resolution property, with a three-zone phase-only pupil filters as example.