Effect of fabrication errors on superresolution property of a pupil filter

Abstract

Three analytical models have been established for superresolution parameters G(Ae), G(Te), and S(e) related to transmission function A(rho), phase function of phi(rho), and the structural parameters with fabrication errors of an N-zone circular-symmetrical superresolution pupil filter. These new models established, directly relate the superresolution parameters of an N-zone super-resolution pupil filter to its fabrication errors to make the quantitative analyses of the effect of fabrication errors easier, thereby providing a theoretical basis for the analysis, design, and fabrication of an N-zone super-resolution pupil filter. The models established for G(Ae), G(Te), and S(e) have been used to analyze the effect of the fabrication errors of a three-zone phase-only pupil filter on its superresolution property, to verify their validities.