Abstract
Processing of lead-based ferroelectric thin films with a chemical solution deposition on Pt/Ti/SiO 2 /Si requires excess lead in the alkoxide-precursor solutions. Excess lead results in the low-temperature processing and improved electrical properties. However, the effect of excess lead on the properties of resultant thin films are not well understood because of the extrinsic effects. In this paper, we investigate the effect of excess lead in the precursor solutions on dielectric and ferroelectric properties of the lead titanate thin films.
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