Abstract
The effect of deformation nanostructuring of copper, nickel, and titanium on ion-induced morphology and sputtering under 30 keV argon ions high-fluence irradiation along the normal to the surface has been studied. Sputtering of a layer commensurate with the size of metal grains leads to a uniform cone-shaped relief, the stationary erosion of which occurs with significant redepositing of atoms.
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