Abstract
Abstract Barium Strontium Titanate (Ba 0.5 Sr 0.5 TiO 3 ) thin films on (100) oriented MgO substrates were deposited by Pulsed Laser Deposition (PLD) technique. The deposition temperature of 750 °C is kept constant and the oxygen working pressure is varied from ~ 1 × 10 − 1 mbar to 1 × 10 − 4 mbar. The X-ray diffraction pattern shows that higher oxygen working pressure deposited films are partially crystalline. The lower oxygen working pressure (1 × 10 − 4 mbar) deposited films showed improved crystallinity. The crystallinity is further increased with a particular orientation as the laser fluence increased from 1.4 J/cm 2 to 2 J/cm 2 .The microwave dielectric properties of these films were measured using Inter Digitated Capacitor (IDC) test structure. It is found that the maximum tunability (in IDC configuration) of 16.5% at 1GHz is obtained for oxygen working pressure and high fluence (1 × 10 − 4 mbar and 2 J/cm 2 ) deposited films, whereas the other films tunabilities are in the range of 1–2% only. These studies also help us to explore the correlation between structure and microwave dielectric properties. Hence, in the present study the 1 × 10 − 4 mbar and 2 J/cm 2 deposition conditions are found to be more helpful in unleashing conditions that lead to better tunability in Ba 0.5 Sr 0.5 TiO 3 films.
Published Version
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