Abstract
Dense Al2O3 films prepared by high power impulse magnetron sputtering at pulsed kV bias
Published Version
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https://doi.org/10.1016/j.tsf.2025.140611
Journal: Thin Solid Films | Publication Date: Feb 1, 2025 |
Dense Al2O3 films prepared by high power impulse magnetron sputtering at pulsed kV bias
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