Abstract
Cathodic cage discharge was developed recently in order to eliminate phenomena as edge effect and overheating, which occurs during conventional processes. In this study, the effect of cage configuration in active species during the deposition process and optical properties of TiN film were studied. TiN compound was chosen because its optical properties are very sensitive to slight variations in microstructure and film thickness, becoming a good monitoring tool in fabrication process control. Cages were made of titanium and have different holes numbers and holes diameter. Electrical efficiency of the system and optical properties of TiN films were strongly influenced by experimental conditions. It was found that with more holes at the top of cage, deposition rate and crystallinity were higher, if compared to cages with a small number of holes at the top. On the other hand, the opposite behavior was observed when more holes were located at the sidewall of cage.
Highlights
Cathodic cage plasma technique was recently developed in order to eliminate edge effect and overheating, which occurs during thermochemical treatment with plasma
Cathodic cage deposition at the L1T8F12 configuration, where some lines corresponding to Ar, H2 and N2 transitions are highlighted
TiN films can be grown on glass substrates by cathodic cage discharge;
Summary
Cathodic cage plasma technique was recently developed in order to eliminate edge effect and overheating, which occurs during thermochemical treatment with plasma. The most recent researches have been regarding the efficiency of cathodic cage in order to modify surfaces of titanium alloys[5], polymer[6] and deposit silver particles on stainless steel substrates[7]. This technique is used to protect electrically the workpiece during the process, resembling a Faraday cage device. The literature reported by Nishimoto[9] and Sousa[10] provided evidence that the distance
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