Effect of Annealing Temperature on the Surface Morphology and Electrical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by Sol-Gel Spin-Coating Method

Abstract

Aluminum doped zinc oxide thin films were prepared through sol gel and spin coating technique from zinc acetate dihydrate and aluminum nitrate nanohydrate in alcoholic solution. The electrical properties and surface morphology study are investigated for the thin films annealed at 350∼500 °C. Zinc oxide thin films deposited on glass and silicon substrates were characterized using electron microscopy (SEM) and current‐voltage (I‐V) measurement scanning for surface morphology and electrical properties study respectively. The SEM investigation shows that zinc oxide thin films are denser at higher annealing temperature. The result indicates electrical properties of aluminum doped zinc oxide thin films are improved with annealing temperatures. The resistivity of aluminum doped zinc oxide thin films are decreased with annealing temperature up to 500 °C.