Abstract
A low energy (100–500 eV) ion source is developed in which a source plasma is generated by microwave discharge in a magnetic field at ECR condition. Positive potential is applied to the source plasma, and ions are accelerated by the sheath drop in front of a mesh screen. A thermionic electron emitter is provided for neutralizing the beam space charge. The ion beam (3 cm in diameter) has little divergence, and the intensity (up to 50 mA) is nearly independent of the accelerating voltage except for the range below 150 V.
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