Abstract
Metal deposition is one of the most effective methods to reconstruct the surface structure of Si, and a number of studies using electron microscopes have been carried out. Endo et al. have studied Au-deposited Si(111) surface by ultra-high vacuum(UHV) scanning electron microscope(SEM), and obtained SEM images of 7 × 7 and 5 × 2-Au structure at 600°C. Ozawa et al. have observed Audeposited Si(111) surface by UHV-transmission electron microscope(TEM) and observed the formation of 5 × 2-Au structure at 700°C. Marks et al. have studied the structure of Au-deposited Si(lll) surface to reconstruct electronic potential on the surface.Recently, we developed a direct heating type- specimen heating holder consists of two heating elements, for use with a conventional analytical TEM, and applied to an in-situ study of the surface reconstruction of Au-deposited Si at high temperature. A schematic drawing of the heating holder is shown in Fig. 1. Tungsten wire with a diameter of 25εm was used as the heating elements. The upper heating element was used for metal deposition, in this case Au, and lower one for the heating of substrate material, in this case Si. The microscope used in the study is a H-9000NAR analytical TEM operated at 300kV. The spherical and chromatic aberration coefficients of the objective lens were 0.69 and 1.4mm, respectively, and the TEM image resolution was 0.175nm
Published Version
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